
Many features
(in a low cost system!)
- Easy to use, 4 & 6 inch aperture downward looking, rigid platforms
- High throughput, vibration isolation table not required
- High resolution, low distortion 1x and 4x optical zoom
- Low coherence, no spurious backside fringes
- High reliability LED light source at 633nm
- Turn-key system with integrated staging
- Polish process development
- Sub-nanometer precision